Evaporation cell

An evaporation cell (10) intended to evaporate a material (7), in order for the later to be deposited onto a substrate (2) placed in a vacuum deposition chamber (20), including:

• an inner enclosure delimiting an evaporation chamber (100) adapted to receive a crucible (110) containing said material (7) to be evaporated, this inner enclosure (100) having an insertion opening (12) for the insertion of the crucible (110) into said evaporation chamber (100),
• evaporation means (101, 131, 132) placed at the periphery of said inner enclosure (100) and adapted to place said crucible (110) in evaporation conditions for the evaporation of the material (7) contained in said crucible (110), when the latter is received in said evaporation chamber (100),
• an injection duct (14) adapted to transport a flow of vapour (3) of the evaporated material (7) from the evaporation chamber (100) to an injector (13) located in said vacuum deposition chamber (20), and
• a stop valve (17) placed on said injection duct (14), characterized in that it includes:
• shutting means (105, 105A) for shutting said insertion opening (12) of the inner enclosure (100) of the evaporation cell (10), such shutting means (105, 105A) having:
• an open configuration allowing the insertion of said crucible (110) into said evaporation chamber (100), and
• a closed configuration in which the evaporation chamber (100) is confined and in communication with the vacuum deposition chamber (20) via the injection duct (14) when the stop valve (17) is open, and
• opening means (18) adapted to provide an evaporation opening in an envelope (111, 112, 115, 116) of said crucible (110), which is filled with the material (7) to be evaporated and maintained under vacuum before the opening, said evaporation opening allowing to place said crucible (110) in communication with said evaporation chamber (100).