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US 2015/0307982 A1Published application
Plasma erosion resistant thin film coating for high temperature application
AssigneeApplied Materials, Inc.
InventorsVahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Martin J. Salinas, Jared Ahmad Lee
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Abstract
An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma resistant ceramic thin film that is resistant to cracking at temperatures of 650 degrees Celsius.
Claims20
An article comprising:
- a body comprising a thermally conductive material;
- a first protective layer on a surface of the body, the first protective layer being a thermally conductive ceramic;
- and
- a second protective layer on the first protective layer, the second protective layer comprising a plasma resistant ceramic thin film that is resistant to cracking at temperatures of up to 650 degrees Celsius.
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A method comprising:
- providing an article comprising a thermally conductive body;
- depositing a first protective layer on a surface of the thermally conductive body, the first protective layer being a thermally conductive ceramic;
- and
- performing ion assisted deposition to deposit a second protective layer over the first protective layer, the second protective layer comprising a plasma resistant ceramic thin film that is resistant to cracking at temperatures of up to 650 degrees Celsius.
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A component for an atomic layer deposition chamber, comprising:
- a graphite body;
- a first protective layer on a surface of the graphite body, the first protective layer comprising silicon carbide;
- and
- a second protective layer on the first protective layer, the second protective layer comprising a plasma resistant ceramic thin film that is resistant to cracking at temperatures of up to 650 degrees Celsius, wherein the second protective layer comprises a ceramic selected from the group consisting of Er3Al5O12, Y3Al5O12 and YF3.
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Dependencies are inferred from the claim text.