Polyimide precursor, polyimide, polyimide film, varnish, and substrate

A polyimide precursor comprising at least one repeating unit represented by the following chemical formula (3):

• wherein A2 is a divalent group of an aromatic diamine or an aliphatic diamine, from which amino groups have been removed;
• and X2 and Y2 are each independently hydrogen, an alkyl group having 1 to 6 carbon atoms, or an alkylsilyl group having 3 to 9 carbon atoms,
• wherein the total content of the repeating units represented by the chemical formula (3) is 30 mol % or more based on the total repeating units.

A polyimide comprising at least one repeating unit represented by the following chemical formula (8):

• wherein B1 is a divalent group of an aromatic diamine or an aliphatic diamine, from which amino groups have been removed,
• wherein the total content of the repeating units represented by the chemical formula (8) is 50 mol % or more based on the total repeating units.

A polyimide comprising at least one repeating unit represented by the following chemical formula (10):

• wherein B2 is a divalent group of an aromatic diamine or an aliphatic diamine, from which amino groups have been removed,
• wherein the total content of the repeating units represented by the chemical formula (10) is 30 mol % or more based on the total repeating units.

A polyimide comprising at least one of repeating units represented by the following chemical formula (12) and the following chemical formula (13):

• wherein B3 is a divalent group of an aromatic diamine or an aliphatic diamine, from which amino groups have been removed,
• wherein B3 is a divalent group of an aromatic diamine or an aliphatic diamine, from which amino groups have been removed,
• wherein the total content of the repeating units represented by the chemical formula (12) and the chemical formula (13) is 80 mol % or more based on the total repeating units.

(canceled)

(canceled)