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US 2015/0306812 A1Published application
Nanoimprinting master template
AssigneeHGST Netherlands B.V.
InventorsHe Gao, Jeffrey S. Lille
Life of this patent
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Abstract
A nanoimprinting master template is an ultraviolet-transparent substrate, like fused quartz, with a metallic layer having silicon dioxide pillars extending from the metallic layer and an optional silicon dioxide film on the pillars and on regions of the metallic layer between the pillars. The pillars have a generally rectangular shape and are arranged as a pattern of radial spokes and concentric rings.
Claims14
A master imprint template for use in imprinting magnetic recording disks comprising:
- an ultraviolet-transparent substrate having a generally planar surface with a center;
- a metallic layer on the substrate surface and resistant to etching in a fluorine-containing plasma, the metallic layer having a thickness greater than or equal to 1 nm and less than or equal to 5 nm;
- and
- a plurality of silicon dioxide pillars extending from the metallic layer and arranged into generally radial spokes from said substrate center and generally concentric rings about said substrate center.
1 more element
A master imprint template for use in imprinting magnetic recording disks comprising:
- an ultraviolet-transparent substrate having a generally planar surface with a center;
- a metallic layer on the substrate surface and resistant to etching in a fluorine-containing plasma, the metallic layer having a thickness greater than or equal to 1 nm and less than or equal to 5 nm;
- a plurality of silicon dioxide pillars extending from the metallic layer, the pillars having a generally rectangular shape and arranged into generally radial spokes from said substrate center and generally concentric rings about said substrate center;
- and
- a film of silicon dioxide having a thickness greater than or equal to 0.5 nm and less than or equal to 5 nm on the pillars and on regions of the metallic layer between the pillars.
2 more elements
Dependencies are inferred from the claim text.