Light-transmitting imprinting mold and method for manufacturing large-area mold
AssigneeSoken Chemical & Engineering Co., Ltd.
InventorYukihiro MIYAZAWA
Life of this patent
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Abstract
An imprint method including the steps of: an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member made less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured by the use of the light shielding member provided so as to reproduce the concave-convex pattern of the transparent substrate.
Claims7
1-6. (canceled)
A light-transmitting imprint mold, comprising:
- a transparent substrate having a patterned region onto which a concave-convex pattern is formed;
- and
- a light shielding member provided on the patterned region;
- wherein
- the light shielding member is provided at an edge portion of the patterned region so as to cover the concave-convex pattern, both of a concave portion and a convex portion of the concave-convex pattern being continuously covered;
- and
- a surface profile of the light shielding member reproduces the concave-convex pattern.
An imprint method comprising the steps of:
- an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member being less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured;
- a separating step to separate the mold from the photo curing resin after the exposing step;
- a moving step to move the mold so that an end of the light transmitting region of the mold is positioned on the semi-cured portion of the photo curing resin;
- and
- a repeating step to repeat the exposing step and the separating step with the mold positioned at a position after the moving step.
Dependencies are inferred from the claim text.