Systems for, methods of, and apparatus for processing substrate surfaces
AssigneeSilicon Quest International, Incorporated
InventorsYevsey SENDERZON, Michael LYU
Life of this patent
Estimating the term…
Abstract
The following description pertains to processing substrates using processes such as, but not limited to, polishing or lapping. Descriptions of systems, methods, and apparatuses according to one or more embodiments of the present invention are presented.
Claims22
A substrate holder for a first substrate and a second substrate, the first substrate and the second substrate each having a work surface, the substrate holder comprising:
- a substantially rigid body having a first side and a second side on opposite sides of the body so as to hold the first substrate on the first side and the second substrate on the second side so that the work surface of the first substrate faces away from and is parallel to the work surface of the second substrate;
- the first side having a first recessed area sized to receive the first substrate, the second side having a second recessed area sized to receive the second substrate.
A substrate holder for a first substrate and a second substrate, the first substrate and the second substrate each having a work surface, the substrate holder comprising:
- a metal disk-shaped body having a first side and a second side on opposite sides of the body;
- the first side having a first recessed area sized to receive the first substrate, the depth of the first recessed area being not greater than the thickness of the first substrate;
- the second side having a second recessed area sized to receive the second substrate, the depth of the second recessed area being not greater than the thickness of the second substrate;
- so as to hold the first substrate on the first side and the second substrate on the second side so that the work surface of the first substrate faces away from and is parallel to the work surface of the second substrate.
A substrate holder for two or more substrates, each of the two or more substrates having a work surface, the substrate holder comprising:
- a substantially rigid body having a first side and a second side on opposite sides of the body, the first side having one or more recessed areas to receive one or more of the two or more substrates, the second side having one or more recessed areas to receive one or more of the two or more substrates, wherein the work surface of the one or more substrates on the first side faces the opposite direction of the work surface of the one or more substrates on the second side.
Dependencies are inferred from the claim text.