Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation
AssigneeHamamatsu Photonics K.K.
InventorsYoshinori Honda, Hiroyuki Taketomi, Fumitsugu Fukuyo, Koji Kawai, Hidetsugu Takaoka, Takashi Suzuki
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Abstract
A target for ultraviolet light generation comprises a substrate adapted to transmit ultraviolet light therethrough and a light-emitting layer disposed on the substrate and generating ultraviolet light UV in response to an electron beam. The light-emitting layer includes a powdery or granular rare-earth-containing aluminum garnet crystal doped with an activator. The light-emitting layer has an ultraviolet light emission peak wavelength of 300 nm or shorter.
Claims12
A target for ultraviolet light generation comprising:
- a substrate adapted to transmit ultraviolet light therethrough;
- and
- a light-emitting layer disposed on the substrate and generating ultraviolet light in response to an electron beam;
- wherein the light-emitting layer includes a powdery or granular rare-earth-containing aluminum garnet crystal doped with an activator, the light-emitting layer having an ultraviolet light emission peak wavelength of 300 nm or shorter.
A method for manufacturing a target for ultraviolet light generation, the method comprising depositing a powdery or granular rare-earth-containing aluminum garnet crystal, doped with an activator, having an ultraviolet light emission peak wavelength of 300 nm or shorter on a substrate adapted to transmit ultraviolet light therethrough and heat-treating the rare-earth-containing aluminum garnet crystal, so as to melt and then resolidify a surface of the rare-earth-containing aluminum garnet crystal to form a melted crystal layer.
Dependencies are inferred from the claim text.