Electro discharge machining system and method of operation thereof
AssigneeApplied Materials, Inc.
InventorFatih Mert Ozkeskin
Life of this patent
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Abstract
An electro discharge machining system, and method of manufacture therefor, providing: an electro discharge machining unit and control; a workpiece holder; a tool having an electrode array formed of a plurality of geometrically shaped electrodes; and wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.
Claims20
A method of manufacturing an electro discharge machining system comprising:
- providing an electro discharge machining unit and control;
- providing a workpiece holder;
- providing a tool holder for a tool having an electrode array formed of a plurality of geometrically shaped electrodes;
- and
- operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.
An electro discharge machining system comprising:
- an electro discharge machining unit and control;
- a workpiece holder;
- a tool holder for a tool having an electrode array formed of a plurality of geometrically shaped electrodes;
- and
- wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.
A method of manufacturing an electro discharge machining system comprising:
- providing a micro electro discharge machining unit and control for providing and controlling an electro discharge;
- providing a workpiece holder for holding a workpiece;
- providing a tool holder for holding a tool having an electrode array including a plurality of pyramidal electrodes;
- and
- operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of inverted pyramidal structures.
Dependencies are inferred from the claim text.