Shape measuring apparatus, structure manufacturing system, stage apparatus, shape measuring method, structure manufacturing method, program, and recording medium
AssigneeNikon Corporation
InventorTORU ARAMAKI
Life of this patent
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Abstract
Provided is a shape measuring apparatus that is capable of suppressing adverse effects on measurement accuracy. A probe is provided with an illumination optical system that irradiates an object with light and an image capturing device that detects light reflected by the object. A rotation mechanism that rotates the probe is disposed at a position distanced from a rotation axis line. Attitude of the probe) relative to the object can be changed in accordance with the rotation of the probe. Signals detected by the image capturing device are calculated by a shape information acquisition unit.
Claims16
A shape measuring apparatus configured to measure a shape of a subject, the apparatus comprising:
- a probe including an irradiating optical system configured to irradiate the subject with light and an imaging element configured to detect light with which the subject is irradiated and which is reflected by the subject;
- a rotation mechanism configured to rotate the probe around the subject;
- a holding section disposed at a distance from a rotation axis of the rotation mechanism, the holding section holding the probe and changing an attitude of the probe relative to the subject in accordance with the rotation of the probe;
- and
- a calculating unit configured to calculate shape information of the subject using a signal detected by the imaging element.
A stage apparatus used in a shape measuring apparatus that measures a shape of a subject, the stage apparatus comprising:
- a rotation mechanism configured to cause a probe to rotate around the subject, the probe including an irradiating optical system configured to irradiate the subject with light and an imaging element configured to detect light with which the subject is irradiated and which is reflected by the subject;
- and
- a holding section disposed at a distance from a rotation axis of the rotation mechanism, the holding section holding the probe and changing an attitude of the probe relative to the subject in accordance with the rotation of the probe.
A shape measuring method of measuring a shape of a subject, comprising:
- irradiating the subject with light emitted from a probe, receiving light reflected by the subject using an imaging element, and detecting a signal from the imaging element, the probe including an irradiating optical system configured to irradiate the subject with the light and the imaging element configured to detect the light with which the subject is irradiated and which is reflected by the subject;
- and
- changing an attitude of the probe relative to the subject in accordance with rotation of the probe, the probe being disposed at a position distanced from a rotation axis on which the probe is rotated around the subject.
A non-transitory computer readable medium storing a program causing a computer to execute a method, the method comprising:
- rotating a probe around a subject with the prove distanced from a rotation axis of the probe, the probe including an irradiating optical system configured to irradiate the subject with light and an imaging element that detects light with which the subject is irradiated and which is reflected by the subject;
- detecting a signal from the imaging element using the probe;
- and
- acquiring shape information of the subject using the detected signal.
Dependencies are inferred from the claim text.