Linear Motor and Lithography Arrangement Including Linear Motor

A linear switched reluctance motor comprising:

• a fixed stator including first, second and third poles disposed on a plane in a spatial sequence, wherein the first and third poles having a coil wound thereon;
• and
• a rotor including fourth and fifth poles disposed in the plane, the rotor constructed and arranged to be linearly movable in two dimensions when the first, second and third poles of the fixed stator become energized in response to the coils wound on the first and third poles being energized in a temporal sequence, wherein the fourth and fifth poles are disposed opposite the first, second and third poles and the fixed stator is constructed and arranged to be fixed relative to the rotor.

A linear switched reluctance motor comprising:

• a stator having a fixed coil arrangement, the stator including at least two poles disposed on a plane in a spatial sequence;
• and
• a rotor including at least one pole disposed in the plane, the rotor constructed and arranged to be linearly movable in two dimensions by the fixed coil arrangement while the stator is constructed and arranged to remain stationary relative to the rotor, wherein the at least one pole is disposed opposite the at least two poles.