Apparatus for generating plasma
AssigneeElectronics and Telecommunications Research Institute
InventorsHan Young YU, Yark Yeon KIM, Won Ick JANG, Yong Sun YOON, Bong Kuk LEE
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Abstract
Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably.
Claims20
An apparatus for generating plasma, the apparatus comprising:
- a nozzle array configured to discharge plasma;
- a first electrode disposed to surround the nozzle array;
- and
- a housing disposed to surround the nozzle array and first electrode,
- wherein the nozzle array includes a plurality of nozzles disposed adjacent to one another in the form of an array, each nozzle configured to discharge plasma.
An apparatus for generating plasma, the apparatus comprising:
- a plasma generating unit configured to generate plasma;
- and
- a plasma outlet configured to outlet the generated plasma,
- wherein the plasma outlet disperses the plasma generated by the plasma generating unit in a plurality of plasma flows.
An apparatus for generating plasma, the apparatus comprising:
- a fluid inflow unit configured to generate fluid;
- a fluid moving path configured to move the generated fluid;
- and
- at least one plasma curtain disposed inside or outside the fluid moving path, and configured to spray the plasma to the fluid.
Dependencies are inferred from the claim text.