# US 2015/0244149 A1 · Tunable Semiconductor Device And Method For Making Tunable Semiconductor Device

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- Number: US 2015/0244149 A1
- Document ID: US20150244149A1
- Status: Published application
- Kind: A1
- Application number: 14/403,989
- Filed: 2012-05-30
- Published: 2015-08-27
- Earliest claimed: 2012-05-30
- Assignees: Euphoenix
- Applicants: EUPhoenix B.V.
- Inventors: Bob Van Someren
- Web page: https://patentgrep.com/patent/US20150244149A1

## CPC

- H01S 5/1234: {Actively induced grating, e.g. acoustically or electrically induced}
- H01S 5/0607: {by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature}
- H01S 5/2031: {characterized by special waveguide layers, e.g. asymmetric waveguide layers or defined bandgap discontinuities}
- H01S 5/22: having a ridge or stripe structure
- H01S 5/343: in AIIIBV compounds, e.g. AlGaAs-laser {, InP-based laser}
- H01S 5/1237: {Lateral grating, i.e. grating only adjacent ridge or mesa}
- H01S 5/305: {characterised by the doping materials used in the laser structure}
- H01S 5/3211: {characterised by special cladding layers, e.g. details on band-discontinuities}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

Method and apparatus for a tunable laser device. In one aspect, a tunable laser device comprises a first doped cladding layer on a semiconductor substrate, a first waveguide layer of essentially undoped piezoelectric material on a top surface of the first doped cladding layer, an active layer on the top surface of the first waveguide layer, a second waveguide layer of essentially undoped piezoelectric material on the top surface of the active layer, a longitudinal structure parallel to a longitudinal axis of the semiconductor device on a top surface of the second waveguide layer comprising a doped semiconductor material, and a longitudinal interdigitated transducer (IDT) formed on the top surface of the second waveguide layer or on the bottom surface of the first waveguide layer, the IDT extending longitudinally in a direction parallel to the longitudinal axis and being arranged to, in response to a signal from a signal generator, generate a surface acoustic wave (SAW) in a direction parallel to the longitudinal axis.

## Claims

### Claim 1

A process for forming a semiconductor device, comprising:
forming a first doped cladding layer on a semiconductor substrate, the first doped cladding layer having a top surface and a bottom surface, the bottom surface in contact with the semiconductor substrate;
forming a first waveguide layer of essentially undoped piezoelectric material on the top surface of the first doped cladding layer, the first waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first doped cladding layer;
forming an active layer on the top surface of the first waveguide layer, the active layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first waveguide layer;
forming a second waveguide layer of essentially undoped piezoelectric material on the top surface of the active layer, the second waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the active layer;
forming a second doped cladding layer on the top surface of the second waveguide layer, the second doped cladding layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the second waveguide layer;
etching a first portion of the second doped cladding layer from the top surface of the second doped cladding layer to form a longitudinal structure from a second portion of the second doped cladding layer, the longitudinal structure being in a direction parallel to a longitudinal axis of the semiconductor device; and
forming a first longitudinal interdigitated comb structure on one of the top surface of the second waveguide layer or the bottom surface of the first waveguide layer, the interdigitated comb structure and the essentially undoped piezoelectric material being a interdigitated transducer (IDT) extending longitudinally in a direction parallel to the longitudinal axis and being arranged to, in response to a signal from a signal generator, generate a surface acoustic wave (SAW) in a direction parallel to the longitudinal axis.

### Claim 2 (depends on 1)

The process of claim 1, wherein:
forming a first longitudinal interdigitated comb structure on one of the top surface of the second waveguide layer or the bottom surface of the first wave guide layer comprises:
forming the first longitudinal interdigitated comb structure on a top surface portion of the second waveguide layer by depositing a metal layer on the top surface portion of the second waveguide.

### Claim 3 (depends on 2)

The process of claim 2, forming the first longitudinal interdigitated comb structure on the top surface portion of the second waveguide layer comprises forming the first longitudinal interdigitated comb structure extending essentially over an entire length of the active layer and spaced apart from the longitudinal structure.

### Claim 4 (depends on 3)

The process of claim 3, wherein forming the first longitudinal interdigitated comb structure on the top surface portion of the second waveguide layer comprises forming the first longitudinal comb structure spaced apart from the longitudinal structure by a distance between 50 nm and 100 micron (μm).

### Claim 5

A process for forming a semiconductor device, comprising:
forming a first doped cladding layer on a semiconductor substrate, the first doped cladding layer having a top surface and a bottom surface, the bottom surface in contact with the semiconductor substrate;
forming a first waveguide layer of essentially undoped piezoelectric material on the top surface of the first doped cladding layer, the first waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first doped cladding layer;
forming an active layer on the top surface of the first waveguide layer, the active layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first waveguide layer;
forming a second waveguide layer of essentially undoped piezoelectric material on the top surface of the active layer, the second waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the active layer;
forming a second doped cladding layer on the top surface of the second waveguide layer, the second doped cladding layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the second waveguide layer;
etching a first portion of the second doped cladding layer from the top surface of the second doped cladding layer to form a longitudinal structure and a longitudinal interdigitated transducer (IDT) from a second portion of the second doped cladding layer, the longitudinal structure being in a direction parallel to a longitudinal axis of the semiconductor device, the etching exposing a first surface portion of the second waveguide layer, and the IDT formed on the first surface portion of the second waveguide layer and extending longitudinally in a direction parallel to the longitudinal axis and being arranged to, in response to a signal from a signal generator, generate a surface acoustic wave (SAW) in a direction parallel to the longitudinal axis.

### Claim 6 (depends on 1, 5)

The process of any of claim 1 or 5, wherein forming the first waveguide layer and forming the second waveguide layer comprises forming the first waveguide layer and forming the second waveguide layer from a III/V semiconductor material.

### Claim 7 (depends on 5)

The process of claim 5, wherein etching the first portion of the second doped cladding layer from the top surface of the second doped cladding layer to form the longitudinal structure and the longitudinal interdigitated transducer from the second portion of the second doped cladding layer comprises forming the first longitudinal interdigitated transducer extending essentially over an entire length of the active layer and spaced apart from the longitudinal structure.

### Claim 8 (depends on 7)

The process of claim 7, wherein forming the first longitudinal interdigitated transducer extending essentially over an entire length of the active layer and spaced apart from the longitudinal structure comprises forming the first longitudinal interdigitated transducer spaced apart from the longitudinal structure by a distance between 50 nm and 100 micron (μm).

### Claim 9

A tunable semiconductor device, comprising:
a first doped cladding layer on a semiconductor substrate, the first doped cladding layer having a top surface and a bottom surface, the bottom surface in contact with the semiconductor substrate;
a first waveguide layer of essentially undoped piezoelectric material on the top surface of the first doped cladding layer, the first waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first doped cladding layer;
an active layer on the top surface of the first waveguide layer, the active layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the first waveguide layer;
a second waveguide layer of essentially undoped piezoelectric material on the top surface of the active layer, the second waveguide layer having a top surface and a bottom surface, the bottom surface in contact with the top surface of the active layer;
a longitudinal structure parallel to a longitudinal axis of the semiconductor device on the top surface of the second waveguide layer comprising a doped semiconductor material; and
a longitudinal interdigitated transducer (IDT) formed on the top surface of the second waveguide layer or on the bottom surface of the first waveguide layer, the IDT extending longitudinally in a direction parallel to the longitudinal axis and being arranged to, in response to a signal from a signal generator, generate a surface acoustic wave (SAW) in a direction parallel to the longitudinal axis.

### Claim 10 (depends on 9)

The tunable semiconductor device of claim 9, wherein:
the doped semiconductor material of the longitudinal structure parallel to the longitudinal axis of the semiconductor device on the top surface of the second waveguide layer is doped according to a first doping gradient having an increase in doping concentration in proportion to a vertical height of the longitudinal structure as measured from the top surface of the second waveguide layer; and
the longitudinal interdigitated transducer is formed on the top surface of the second waveguide layer and is of a height equal to the longitudinal structure and comprises a doped semiconductor material that is doped according to the first doping gradient.

### Claim 11 (depends on 9)

The tunable semiconductor device of claim 9, wherein the longitudinal interdigitated transducer is formed on the top surface of the second waveguide layer and comprises a longitudinal interdigitated comb structure on the top surface of the second waveguide layer.

### Claim 12 (depends on 10, 11)

The tunable semiconductor device of any of claim 10 or 11, wherein the first longitudinal interdigitated transducer extends essentially over an entire length of the active layer and is spaced apart from the longitudinal structure.

### Claim 13 (depends on 11)

The tunable semiconductor device of claim 11, wherein the first longitudinal interdigitated transducer is spaced apart from the longitudinal structure by a distance between 50 nm and 100 micron (μm).

### Claim 14 (depends on 11)

The tunable semiconductor device of claim 11, wherein the first longitudinal interdigitated transducer is configured to receive a reverse bias DC voltage during operation.