Silicone rubber material for soft lithography
AssigneeKoninklijke Philips N.V.
InventorMARCUS ANTONIUS VERSCHUUREN
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Abstract
The present invention relates to a silicone rubber like material and a printing device including a stamp layer comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer and use thereof in lithographic processes.
Claims4
A printing device including a patterned stamp layer, the stamp layer comprising a silicone rubber like material comprising at least one Q branched and/or T branched (poly)siloxane crosslinked by at least one linear polysiloxane, wherein said material has a Young's modulus in the range of 7 MPa to 80 MPa.
The printing device according to claim 2 wherein the stamp layer comprises a pattern of features.
A patterned stamp layer comprising a silicone rubber like material having a Young's modulus in the range of from 7 MPa to 80 MPa.
Dependencies are inferred from the claim text.