Device and method for wafer taping
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYuh-Sen CHANG, Shang-Hsien LIN, Chih-Yang CHAN, Szu-Hsien LEE, Chia-Haw YEH
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYuh-Sen CHANG, Shang-Hsien LIN, Chih-Yang CHAN, Szu-Hsien LEE, Chia-Haw YEH
Estimating the term…
In accordance with some embodiments, a wafer taping device is provided. The wafer taping device includes a tape delivering along a first direction. The wafer taping device also includes a wafer mount unit disposed below the tape. The wafer mount unit has an upper surface for supporting a wafer and having a notch for allowing a cut mark of the wafer to align with it. The notch is staggered with a second direction in the upper surface, and the second direction is substantially perpendicular to the first direction. In addition, the wafer taping device includes a laminating roller disposed above the wafer mount unit and having a long axis elongated in the second direction. The laminating roller is configured to reciprocate along the first direction for pressing the tape to the wafer.
A wafer taping device, comprising:
A method of taping a wafer, comprising:
A wafer taping device, comprising:
Dependencies are inferred from the claim text.