Substrate peeling device and method for peeling substrate
AssigneeSamsung Display Co., Ltd.
InventorsBo Ram LEE, Sang Il KIM, Kwang Ho LEE, Hyun Jun KIM, Kyu Jin CHO
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Abstract
A substrate peeling device including an attachment/detachment unit attached to a first substrate and a second substrate, which is coupled to the first substrate, to peel the second substrate, a sensing unit configured to sense a speed at which the first substrate and the second substrate are peeled by the attachment/detachment unit, and a control unit configured to control the attachment/detachment unit to constantly maintain an angle at which the first substrate and the second substrate are peeled.
Claims19
A substrate peeling device comprising:
- an attachment/detachment unit configured to be attached to a first substrate and a second substrate, which is coupled to the first substrate, to peel apart the second substrate;
- a sensing unit configured to sense a speed at which the first substrate and the second substrate are peeled apart by the attachment/detachment unit;
- and
- a control unit configured to control the attachment/detachment unit to maintain a substantially constant peeling angle for the first substrate and the second substrate.
A substrate peeling device comprising:
- an attachment/detachment unit configured to be attached to a first substrate and a second substrate, which is coupled to the first substrate, to peel apart the second substrate;
- a sensing unit configured to sense a speed at which the first substrate and the second substrate are peeled apart by the attachment/detachment unit;
- a transport unit configured to transport the first substrate in one direction;
- and
- a control unit configured to control the attachment/detachment unit and the transport unit to constantly maintain a peeling angle at which the first substrate and the second substrate are peeled apart.
A method for peeling a substrate, comprising:
- peeling apart a second substrate by attaching a first substrate and the second substrate, which is coupled to the first substrate, to an attachment/detachment unit;
- and
- sensing a speed at which the first substrate and the second substrate are peeled,
- wherein an angle at which the first substrate and the second substrate are peeled is controlled to be maintained at a substantially constant value.
Dependencies are inferred from the claim text.