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US 2015/0217416 A1Published application
Methods for Fabricating Apparatus Having a Hermetic Seal
AssigneeMicrolux Technology, Inc.
InventorTom T. Nguyen
Life of this patent
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Abstract
Methods for fabricating a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
Claims14
A method for forming a hermetic seal in an apparatus comprises:
- providing a housing having a cavity with walls;
- placing a seal inside the cavity;
- placing an apparatus part in the cavity in contact with the seal;
- compressing the cavity walls down on the seal and the apparatus part so that the seal is deformed to provide the hermetic seal and the walls are crimped down on the apparatus part to provide a retaining force therefor within the housing.
1 more element
Dependencies are inferred from the claim text.