Fabrication equipment monitoring device and monitoring method
AssigneeTokyo Electron Limited
InventorsKaname Yamaji, Kazuya Uoyama, Yasuyuki Morita, Hiroaki Miyatake
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AssigneeTokyo Electron Limited
InventorsKaname Yamaji, Kazuya Uoyama, Yasuyuki Morita, Hiroaki Miyatake
Estimating the term…
A fabrication equipment monitoring device which monitors, by a server and a portable terminal capable of communicating with the server, specifies the fabrication equipment toward which image capture element is faced, extracts the fabrication equipment information of the specified fabrication equipment from the storage unit based on the location information acquired by the location information acquisition unit, a direction information detected by the direction detection unit, an angle of view of the image capture element and the layout information when the image capture element is faced toward the fabrication equipment and displays at least a portion of the extracted fabrication equipment information on the display unit.
A fabrication equipment monitoring device which monitors, by a server and a portable terminal capable of communicating with the server, a fabrication equipment located inside a factory and including at least a plurality of fabrication devices,
A fabrication equipment monitoring device which monitors, by a server and a portable terminal capable of communicating with the server, a fabrication equipment located inside a factory,
A fabrication equipment monitoring method which monitors, by a server and a portable terminal capable of communicating with the server, a fabrication equipment located inside a factory and including at least a plurality of fabrication devices,
A fabrication equipment monitoring method which monitors, by a server and a portable terminal capable of communicating with the server, a fabrication equipment located inside a factory,
Dependencies are inferred from the claim text.