Apparatus for decomposing perfluorocarbon and harmful gas using high-density confined plasma source
AssigneeTeraTech Corporation
InventorsJin Hong, Gi-Chung Kwon
Life of this patent
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Abstract
The present invention relates to an apparatus for decomposing perfluorocarbons and harmful gas using a high-density confined plasma source that includes: a reactor having inlet and outlet ports formed in the top and bottom sides thereof for receiving and discharging perfluorocarbons and harmful gas, a chamber having an internal passage, a ferrite core formed outside of the chamber and connected to an antenna, and a permanent magnet arranged around the ferrite core; a gas supply portion for supplying a gas for decomposing the perfluorocarbons and harmful gas into the reactor; and a generator and a controller for supplying electric power for the antenna of the reactor.
Claims19
A perfluorocarbon decomposing apparatus comprising:
- a reactor having inlet and outlet ports formed in the top and bottom sides thereof for receiving and discharging perfluorocarbons and harmful gas, a chamber having an internal passage, a ferrite core formed outside of the chamber and connected to an antenna, and a permanent magnet arranged around the ferrite core;
- a gas supply portion for supplying a gas for decomposing the perfluorocarbons and harmful gas into the reactor;
- and
- a generator and a controller for supplying electric power for the antenna of the reactor.
Dependencies are inferred from the claim text.