Rtp lamp base improvement
AssigneeApplied Materials, Inc.
InventorsJoseph M. RANISH, Douglas R. MCALLISTER
Life of this patent
Estimating the term…
Abstract
A lamp device for thermal processing of a substrate is provided. The lamp device includes a bulb enclosing a filament, the filament having a pair of leads. The lamp device further includes a lamp base. The lamp base includes a seal connecting the bulb to the lamp base; a sleeve having one or more walls and two ends with one end surrounding the seal; a potting compound filling the sleeve; one or more wires distributed through the sleeve and the potting compound and coupled to the pair of leads; and one or more hookable features located within 10 mm of the sealing end.
Claims20
A lamp device for thermal processing of a substrate comprising:
- a bulb enclosing a filament, the filament having a pair of leads;
- and
- a lamp base comprising:
- a seal connecting the bulb to the lamp base, wherein the bulb extends away from the lamp base in a first direction;
- a sleeve having one or more walls and two ends, wherein one of the two ends is a sealing end that surrounds the seal;
- one or more wires distributed through the sleeve and coupled to the pair of leads;
- and
- one or more hookable features located within 10 mm of the sealing end to enable use of a hook to disconnect and remove the lamp device from an electrically connected position by pulling the hook in substantially the first direction when the hook is engaged with one of the hookable features.
A lamp device for thermal processing of a substrate comprising:
- a bulb enclosing a filament, the filament having a pair of leads;
- and
- a lamp base comprising:
- a seal connecting the bulb to the lamp base, wherein the bulb extends away from the lamp base in a first direction;
- a sleeve extending around a longitudinal axis and having a first end and a second end, the first end being opposite of the second end, wherein the first end surrounds the seal;
- and
- one or more hookable features located within 10 mm of the first end to enable use of a hook to disconnect and remove the lamp device from an electrically connected position by pulling the hook in substantially the first direction when the hook is engaged with one of the hookable features.
A lamp device for thermal processing of a substrate comprising:
- a bulb enclosing a filament, the filament having a pair of leads;
- and
- a lamp base comprising:
- a seal connecting the bulb to the lamp base, wherein the bulb extends away from the lamp base in a first direction;
- a sleeve extending around a longitudinal axis and having a first end and a second end, the first end being opposite of the second end, wherein the first end surrounds the seal;
- a potting compound filling the sleeve;
- and
- one or more tabs having one or more holes, the one or more holes located within 10 mm of the first end, wherein the one or more tabs extend from the first end and are angled towards the longitudinal axis to enable use of a hook to disconnect and remove the lamp device from an electrically connected position by pulling the hook in substantially the first direction when the hook is engaged with one of the holes of the one or more tabs.
Dependencies are inferred from the claim text.