Substrate processing apparatus, program and substrate processing method

A program which can be read by a computer, said program being adapted to be executed by said computer, thereby causing said computer to function as a schedule creating part in a substrate processing apparatus including a sealed container provided with an opening for introducing and discharging a substrate therein and therefrom, an opening/closing part adapted to open and close said opening, a processing part adapted to perform predetermined process on said substrate, and a substrate transferring part adapted to discharge the substrate from said sealed container or to introduce the substrate into said sealed container,

• wherein the schedule creating part is adapted to create a schedule which defines a timing at which said opening/closing part opens and closes said opening, and a time period for which said substrate transferring part discharges the substrate from said sealed container or introduces the substrate into said sealed container, according to a substrate processing time period in said processing part.

A substrate processing method for performing process on a substrate in a substrate processing apparatus including an opening/closing part adapted to open and close an opening formed in a sealed container for enabling introducing or discharging the substrate therein and therefrom, a substrate transferring part adapted to introduce or discharge the substrate through said opening, and a processing part adapted to perform predetermined process on the substrate, the substrate processing method comprising

• (a) a step of creating a processing schedule for performing process on the substrate in said processing part, and
• (b) a step of determining a timing at which said opening/closing part opens and closes said opening in said sealed container, based on said processing schedule.