# US 2015/0177611 A1 · Mask > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2015/0177611 A1 - Document ID: US20150177611A1 - Status: Published application - Kind: A1 - Application number: 14/357,650 - Filed: 2013-04-12 - Published: 2015-06-25 - Earliest claimed: 2013-02-22 - Assignees: Boe Technology Group Co., Ltd. - Inventors: Wusheng Li - Web page: https://patentgrep.com/patent/US20150177611A1 ## CPC - G03F 1/38: Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof - G03F 1/00: Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof - G03F 1/36: Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes - G03F 1/50: Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A mask is disclosed. The mask includes a light-blocking region and a slit-like light-transmitting region. The slit includes two edges that are disposed oppositely to each other, and each of the edges is made up of a plurality of arcs. ## Claims ### Claim 1 A mask, comprising a light-blocking region and light-transmitting region comprising a slit, the slit comprising two edges opposite to each other, wherein each of the two edges comprises a plurality of continuous arcs; wherein the slit comprises a first slit and a second slit, the first slit and the second slit form a corner, wherein the first slit and the second slit are connected via a corner arc. ### Claim 2 (depends on 1) The mask of claim 1, wherein the plurality of the continuous arcs of the two edges of the slit are symmetrical relative to a central axis. ### Claim 3 (depends on 1) The mask of claim 1, wherein the arcs are semicircles. ### Claim 4 (canceled) ### Claim 5 (depends on 1) The mask of claim 1, wherein the corner comprises an interior angle and an exterior angle, the first slit and the second slit are connected via an interior arc and an exterior arc at the corner. ### Claim 6 (depends on 5) The mask of claim 5, wherein a radius of the interior arc is an average of a radius of an arc of the first slit and a radius of an arc of the second slit, and a radian of the interior arc is equal to an angle of the corner. ### Claim 7 (depends on 5) The mask of claim 5, wherein the interior arc is configured to connect two endpoints of the arcs, the arcs are located on both sides of the interior angle and closest to the interior angle. ### Claim 8 (depends on 5) The mask of claim 5, wherein each of two curved profiles respectively formed by the arcs on both sides of the exterior angle extends toward the apex of the exterior angle and stops at a point having a distance to the apex of the exterior angle less than a diameter of the arc; the exterior arc is a semicircle with a diameter equal to a distance between two points where the two curved profiles stop. ### Claim 9 (depends on 5) The mask of claim 5, wherein each of two curved profiles respectively formed by the arcs on both sides of the exterior angle extends toward the apex of the exterior angle and stops at a point having a distance to the apex of the exterior angle less than a diameter of the arc; the exterior arc is an arc of a circumscribed circle which circumscribes a triangle and touches the two points where the curved profiles stop and the apex of the exterior angle. ### Claim 10 (depends on 5) The mask of claim 5, wherein the exterior arc is configured to connect two endpoints of the arcs, the arcs are located on both sides of the exterior angle and closest to the exterior angle. ### Claim 11 (depends on 4) The mask of claim 4, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis. ### Claim 12 (depends on 5) The mask of claim 5, wherein a connection arc configured to connect the first slit and the second slit is a quarter arc having a radius equal to a half of the difference between inner diameters of the first slit and the second slit. ### Claim 13 (depends on 2) The mask of claim 2, wherein the arcs are semicircles. ### Claim 14 (canceled) ### Claim 15 (canceled) ### Claim 16 (depends on 5) The mask of claim 5, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis. ### Claim 17 (depends on 6) The mask of claim 6, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis. ### Claim 18 (depends on 7) The mask of claim 7, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis. ### Claim 19 (depends on 8) The mask of claim 8, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis. ### Claim 20 (depends on 9) The mask of claim 9, wherein an angle of the corner is 180 degrees, and the central axes of the first slit and the second slit are the same and one central axis.