# US 2015/0176601 A1 · Vacuum pump

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- Number: US 2015/0176601 A1
- Document ID: US20150176601A1
- Status: Published application
- Kind: A1
- Application number: 14/559,413
- Filed: 2014-12-03
- Published: 2015-06-25
- Earliest claimed: 2013-12-25
- Assignees: Shimadzu Corporation
- Applicants: Shimadzu Corporation
- Inventors: Tetsuya TSUBOKAWA
- Web page: https://patentgrep.com/patent/US20150176601A1

## CPC

- F04D 29/522: {especially adapted for elastic fluid pumps}
- F04D 19/042: {Turbomolecular vacuum pumps}
- F04D 19/044: {Holweck-type pumps}
- F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02)

## Abstract

A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.

## Claims

### Claim 1

A vacuum pump comprising:
a vacuum exhaust section, the vacuum exhaust section including
a stator, and
a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator,
a suction port;
a base;
an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and
a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.

### Claim 2 (depends on 1)

The vacuum pump according to claim 1, wherein
the conductance increasing function section is formed on the outer peripheral surface of the stator,
a shape of the outer peripheral surface of the stator allows a distance between the outer peripheral surface of the stator in a region facing the exhaust port and the inner peripheral surface of the base to be larger than a distance between the outer peripheral surface of the stator in a region locating on the suction port side and not facing the exhaust port and the inner peripheral surface of the base.

### Claim 3 (depends on 2)

The vacuum pump according to claim 2, wherein the stator includes a tapered structure formed on the whole circumference of a part of the outer peripheral surface of the stator from the region facing the exhaust port to a tip of the stator.

### Claim 4 (depends on 3)

The vacuum pump according to claim 3, wherein the tapered structure is formed throughout an entire area of the outer peripheral surface of the stator.

### Claim 5 (depends on 2)

The vacuum pump according to claim 2, wherein the outer peripheral surface of the stator includes a large-diameter section formed on one end on the suction port side and a small-diameter section formed on the other end on the tip side, and the small-diameter section faces the exhaust port.

### Claim 6 (depends on 1)

The vacuum pump according to claim 1, wherein the conductance increasing function section is formed on the inner peripheral surface of the base, and a groove recessed on the inner peripheral surface of the base is formed in a predetermined angle range in a circumferential direction including a region where the exhaust port is open.

### Claim 7 (depends on 1)

The vacuum pump according to claim 1, wherein an annular groove is formed on a bottom surface of the base, the bottom surface facing the exhaust path.

### Claim 8 (depends on 1)

The vacuum pump according to claim 1, wherein the entire exhaust port faces the outer peripheral surface of the stator.