Apparatus and method for bulk vapour phase crystal growth
AssigneeKromek Limited NETPark
InventorsTimothy Simon Wright, Steven Colledge, John Tomlinson Mullins
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Abstract
A vapour conduit for use in an apparatus for bulk vapour phase crystal growth, an apparatus for bulk vapour phase crystal growth, and a process for bulk vapour phase crystal growth are described. The vapour conduit is a flow conduit defining a passage means adapted for transport of vapour from a source volume to a growth volume, wherein a flow restrictor is provided in the passage means between the source volume and the growth volume and wherein the flow conduit further comprises a flow director structured to direct vapour flow downstream of the flow restrictor away from a longitudinal centre line of the conduit and for example towards an edge of the conduit.
Claims28
A vapour conduit for use in an apparatus for bulk vapour phase crystal growth comprising:
- a flow conduit defining a passage means adapted for transport of vapour from a source volume to a growth volume, wherein a flow restrictor is provided in the passage means between the source volume and the growth volume and wherein the flow conduit further comprises a flow director structured to direct vapour flow downstream of the flow restrictor away from a longitudinal centre line of the conduit.
A process for bulk vapour phase crystal growth comprising:
- providing at least one reservoir of source material and at least one seed crystal, each associated with independent temperature control means;
- and transporting vapour phase material between source and sink or seed via a flow conduit that defines a passage means with at least one flow restrictor provided in the passage means between the source volume and the growth volume, and at and wherein the flow conduit further comprises a flow director structured to direct vapour flow downstream of the flow restrictor away from a longitudinal centre line of the conduit and for example towards an edge of the conduit.
Dependencies are inferred from the claim text.