Substrate transporter
AssigneeKLA-Tencor Corporation
InventorYoram Hanfling
Life of this patent
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AssigneeKLA-Tencor Corporation
InventorYoram Hanfling
Estimating the term…
Aspects of the present disclosure describe a robot which has a controller, actuators, encoders, and mechanical components. The robot may produce motion about an X, Z, RU, RL, and Theta axes. Movements of the robot are controlled by the controller. The repeatability of the robot is improved by designing the robot such that a control cycle frequency of the controller is 50 times or more greater than a vibrational frequency of one or more of the mechanical components. In order to reduce the release of particulates, a baffled enclosure may be used. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
A robot comprising:
In a robot comprising a controller, one or more actuators configured to be activated by the controller, one or more encoders configured to track the position of the one or more actuators, and one or more mechanical components configured to transform the movement of the one or more actuators into a desired movement of the robot, comprising:
A nontransitory computer readable medium containing program instructions for producing the desired movement of a robot, wherein the robot comprises a controller, one or more actuators configured to be activated by the controller, one or more encoders configured to track the position of the one or more actuators, and one or more mechanical components configured to transform the movement of the one or more actuators into a desired movement of the robot, and wherein execution of the program instructions by one or more processors of a computer system causes the one or more processors to carry out the steps of:
An enclosure substantially enclosing one or more mechanical components configured to produce linear motion, comprising:
Dependencies are inferred from the claim text.