Methods and media for lot dispatch priority

A method of fabricating a semiconductor device from a substrate, the method comprising:

• providing a lot that includes the substrate;
• prioritizing dispatch of the lot according to a dispatch method comprising:
• calculating a lot level goal for processing time of the lot based on a normal goal in response to a lack of delay in processing the lot or in response to a recovered delay in processing the lot;
• calculating the lot level goal for processing time of the lot based on a vectored goal in response to a delay in processing the lot, wherein the vectored goal is based at least in part on a predetermined time in which to reduce the normal goal to recover from a delay in processing the lot;
• and
• prioritizing dispatch of the lot based at least in part on the lot level goal;
• and
• processing the lot based on the dispatch method.

A non-transitory computer readable medium storing control logic for operating a computer system, the control logic including control logic instructions for:

• calculating a lot level goal for processing time of a lot during semiconductor fabrication based on a normal goal in response to a lack of delay in processing the lot or in response to a recovered delay in processing the lot;
• calculating the lot level goal for processing time of the lot based on a vectored goal in response to a delay in processing the lot, wherein the vectored goal is based at least in part on a predetermined time in which to reduce the normal goal to recover from a delay in processing the lot;
• and
• prioritizing dispatch of the lot based at least in part on the lot level goal.