Scanning probe microscopy inspection and modification system
AssigneeTerraspan LLC
InventorVictor B. KLEY
Life of this patent
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Abstract
A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
Claims6
1-90. (canceled)
An SPM system comprising:
- an SM probe for making a modification to the object;
- a positioning system to position the SPM modification probe with respect to the object;
- a source of energy;
- and
- a controller to control the positioning system such that positioning of the SPM probe with respect to the object is made by driving the positioning system simultaneously in the X, Y, and Z dimensions and to modify the object by use of energy from the energy source directed to and interacting with material placed on the object by SM probe.
Dependencies are inferred from the claim text.