Safe separation for nano imprinting
AssigneesCanon Nanotechnologies, Inc., Molecular Imprints, Inc.
InventorsSe-Hyuk Im, Mahadevan Ganapathisubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard M. Schmid, Mario Johannes Meissl, Anshuman Cherala, Frank Y. Xu, Byung-Jin Choi, Sidlgata V. Sreenivasan
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Abstract
Control of lateral strain and lateral strain ratio (dt/db) between template and substrate through the selection of template and/or substrate thicknesses (Tt and/or Tb), control of template and/or substrate back pressure (Pt and/or Pb), and/or selection of material stiffness are described.
Claims20
A nanolithography imprint system comprising:
- a substrate having a thickness Tb and formed of a material having a Young's modulus (Eb);
- a template in superimposition with the substrate, the template having a thickness Tt and formed of a material having a Young's modulus (Et), the template thickness Tt selected such that, during separation of the template and substrate, the lateral strains dt and db associated with the template and substrate, respectively, are matched.
A nanolithography imprint system comprising:
- a substrate having a thickness (Tb) and being formed of a material having a Young's modulus (Eb);
- a template in superimposition with the substrate, the template having a thickness (Tt) and being formed of a material having a Young's modulus (Et);
- chucks and systems configured for supplying and controlling back pressure to the template and/or back pressure to the substrate, such that, during separation of the template and the substrate, the lateral strains dt and db associated with the template and substrate, respectively, are matched.
A nanolithography imprint system comprising:
- a substrate and a template for forming a patterned layer on the substrate, the template and the substrate having lateral strains dt and db associated therewith, respectively, when subsequently subjected to a separation force to separate the template from the patterned layer once formed;
- systems configured for controlling a back pressure applied to the template and the substrate, and further configured to determine the differences between the lateral strains dt and db using an analytical model and/or finite element analysis and based on the determined differences between the lateral strains dt and db, determine the amount of back pressure to apply to the template, the substrate, or both, such that the lateral strains dt and db become matched when the separation force is applied.
Dependencies are inferred from the claim text.