# US 2015/0144801 A1 · Particle beam system and method for operating the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2015/0144801 A1 - Document ID: US20150144801A1 - Status: Published application - Kind: A1 - Application number: 14/562,954 - Filed: 2014-12-08 - Published: 2015-05-28 - Earliest claimed: 2011-09-30 - Assignees: Carl Zeiss Microscopy GmbH - Applicants: Carl Zeiss Microscopy GmbH - Inventors: Josef Biberger; Ralph Pulwey; Volker Wieczorek - Web page: https://patentgrep.com/patent/US20150144801A1 ## CPC - H01J 37/265: {Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination} - H01J 37/045: {Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge} - H01J 37/1472: {Deflecting along given lines} - H01J 37/1474: {Scanning means} - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 2237/043: Beam blanking - H01J 2237/063: Electron sources - H01J 2237/15: Means for deflecting or directing discharge - H01J 2237/2487: using digital signal processors - H01J 2237/2602: Details - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A method of operating a particle beam system includes digitally controlling first and second digitally controlled modules of the particle beam system, and sending digital command data to the first and second digitally controlled modules. The digital command data include at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module. The digital command data is generated based on information representing: a) a time when the first command is to be executed by the first digitally controlled module; and b) a time when the second command is to be executed by the second digitally controlled module. ## Claims ### Claim at position 1 -20. (canceled) ### Claim 21 A method of operating a particle beam system, the method comprising: digitally controlling first and second digitally controlled modules of the particle beam system; and sending digital command data to the first and second digitally controlled modules, wherein: the digital command data comprise at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module; and the digital command data is generated based on information representing: a) a time when the first command is to be executed by the first digitally controlled module; and b) a time when the second command is to be executed by the second digitally controlled module. ### Claim 22 (depends on 21) The method of claim 21, wherein at least one digitally controlled module comprises a beam deflection module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 23 (depends on 21) The method of claim 21, wherein the first digitally controlled module comprises a first beam deflection module, and the second digitally controlled module comprises a second beam deflection module. ### Claim 24 (depends on 21) The method of claim 21, wherein the first digitally controlled module comprises a beam deflection module, and the second digitally controlled module comprises a data acquisition module. ### Claim 25 (depends on 21) The method of claim 21, wherein the second digitally controlled module comprises a data acquisition module. ### Claim 26 (depends on 21) The method of claim 21, wherein at least one digitally controlled module comprises a beam blanking module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 27 (depends on 21) The method according to claim 21, wherein the first digitally controlled module comprises a first blanking module, and the second digitally controlled module comprises a second blanking module. ### Claim 28 (depends on 21) The method according to claim 21, further comprising: determining a first execution time at which the first digitally controlled module is to execute the first command; determining a second execution time at which the second digitally controlled module is to execute the second command; determining a first command time representing a time at which the command data for the first digitally controlled module is to be sent to the first digitally controlled module such that the first command will be executed by the first digitally controlled module at the first execution time; determining a second command time representing a time at which the command data for the second digitally controlled module is to be sent to the second digitally controlled module such that the second command will be executed by the second digitally controlled module at the second execution time; and sending the command data for the first digitally controlled module and the command data for the second digitally controlled module to the first and second digitally controlled modules in an order corresponding to a sort order of the first and second command times. ### Claim 29 (depends on 28) The method of claim 28, wherein at least one digitally controlled module comprises a beam deflection module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 30 (depends on 28) The method of claim 28, wherein at least one digitally controlled module comprises a beam blanking module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 31 (depends on 38) The method of claim 38, wherein the first digitally controlled module comprises a beam deflection module, and the second digitally controlled module comprises a data acquisition module. ### Claim 32 A particle beam system comprising: a first digitally controlled module; a second digitally controlled module; and an encoding module configured generate digital command data, wherein: the digital command data comprises at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module; and the digital command data is generated based on information representing: a) a time when the first command is to be executed by the first digitally controlled module; and b) a time when the second command is to be executed by the second digitally controlled module. ### Claim 33 (depends on 32) The system of claim 32, wherein at least one digitally controlled module comprises a beam deflection module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 34 (depends on 32) The system of claim 32, wherein the first digitally controlled module comprises a first beam deflection module, and the second digitally controlled module comprises a second beam deflection module. ### Claim 35 (depends on 32) The system of claim 32, wherein the first digitally controlled module comprises a beam deflection module, and the second digitally controlled module comprises a data acquisition module. ### Claim 36 (depends on 32) The system of claim 32, wherein the second digitally controlled module comprises a data acquisition module. ### Claim 37 (depends on 32) The system of claim 32, wherein at least one digitally controlled module comprises a beam blanking module, and the at least one digitally controlled module is selected from the group consisting of the first digitally controlled module and the second digitally controlled module. ### Claim 38 (depends on 32) The system of claim 32, wherein the first digitally controlled module comprises a first blanking module, and the second digitally controlled module comprises a second blanking module. ### Claim 39 (depends on 32) The system of claim 32, further comprising a particle beam source. ### Claim 40 (depends on 39) The system of claim 39, further comprising a plurality of devices configured to guide a beam of particles from the particle beam source to a sample.