Planar Positioning System And Method Of Using The Same
AssigneeAkribis Systems Pte Ltd
InventorsSastra Budiman, Yong Peng Leow, Mun Hoon Ng
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Abstract
A positioning system having a flat base comprising (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis; (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration; (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base; and a θ-axis actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
Claims25
A planar positioning system having a flat base comprising
- (i) a X-axis assembly having a X-axis linear actuator means arranged orthogonal to the Y-axis;
- (ii) a Y-axis assembly having a pair of Y-axis linear actuator means mounted onto the flat base forming a H-configuration;
- (iii) a Z-axis assembly having an aerostatic bearing mechanism that floats on thin film of externally pressurized air on top of the flat base;
- and
- (iv) a θ-axis assembly having actuator anchored from the X-axis to drive the Z-axis assembly which carries a workpiece, wherein the Z-axis assembly is rotated with the rotary axis for the θ-axis perpendicular to the flat base.
Dependencies are inferred from the claim text.