# US 2015/0104360 A1 · Combinatorial Flow System and Method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2015/0104360 A1 - Document ID: US20150104360A1 - Status: Published application - Kind: A1 - Application number: 14/573,872 - Filed: 2014-12-17 - Published: 2015-04-16 - Earliest claimed: 2007-12-28 - Assignees: Intermolecular, Inc. - Applicants: Intermolecular, Inc. - Inventors: Zachary Fresco; Rich Endo - Web page: https://patentgrep.com/patent/US20150104360A1 ## CPC - B01J 19/0053: {Details of the reactor} - H10P 72/0404: {for general liquid treatment, e.g. etching followed by cleaning} - H10P 72/0414: {using mainly spraying means, e.g. nozzles} - H10P 72/0424: {using mainly spraying means, e.g. nozzles} - B01J 2219/00353: Pumps - B01J 2219/00418: using pressure - B01J 2219/00495: Means for heating or cooling the reaction vessels - B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A reactor assembly having a plurality of reaction chambers defined therein is provided. The reactor assembly includes a fluid flow module that provides a pressurized control flow of fluid from an open container. In another embodiment, the reactor block includes a plurality of passageways defined over a surface of a substrate to accommodate the combinatorial processing in order to obtain multiple data points from a single substrate. ## Claims ### Claim 1 A fluid dispensing system comprising: a container having an opening for introduction of fluids and an outlet; a pump in fluid communication with the outlet through a multi-way valve; and a reactor in fluid communication with the multi-way valve such that the pump withdraws an amount of fluid from the container into a segment defined between the multi-way valve and the pump and forces the amount of the fluid from the segment into the reactor after transitioning the multi-way valve, wherein an outlet of the reactor constricts a flow of the fluid so that the flow of the fluid through the reactor is pressurized. ### Claim 2 (depends on 1) The fluid dispensing system of claim 1, wherein the flow of the fluid is laminar. ### Claim 3 (depends on 1) The fluid dispensing system of claim 1, wherein the reactor is one of a plurality of reactors disposed over a substrate, the plurality of reactors configured to process regions of the substrate in a combinatorial manner. ### Claim 4 (depends on 3) The fluid dispensing system of claim 3, wherein each region is processed in a substantially uniform manner and differences between regions processed differently are due to a parameter being modified for the differently processed regions. ### Claim 5 (depends on 1) The fluid dispensing system of claim 1, wherein the pump is bi-directional and is one of a syringe pump or a peristaltic pump, and wherein a heating element provides heat for the fluid in the segment. ### Claim 6 (depends on 1) The fluid dispensing system of claim 1, wherein the reactor includes a plurality of partitions contacting a surface of the substrate, the plurality of partitions defining fluid lanes therebetween, the fluid lanes enabling access to the surface of the substrate. ### Claim 7 (depends on 6) The fluid dispensing system of claim 6, wherein one of the partitions includes a window providing access to the surface of the substrate through corresponding fluid lane. ### Claim 8 (depends on 1) The fluid dispensing system of claim 1, wherein an inlet to the reactor is along an axis of the reactor and the flow of the fluid proceeds radially across a surface of a substrate disposed under the reactor. ### Claim 9 A combinatorial processing system, comprising; a plurality of open staging vessels configured to receive fluid for wet processing operations; a plurality of pumps in fluid communication with respective staging vessels through corresponding fluid lines; and a plurality of reactors in fluid communication with respective pumps, wherein the pumps are configured to provide a forced flow of fluid from the respective staging vessels through respective reactors such that the fluid is pressurized within the reactor. ### Claim 10 (depends on 9) The system of claim 9, wherein the respective reactors include partitions contacting a surface of a substrate disposed below the respective reactors, the plurality of partitions defining fluid lanes therebetween, the fluid lanes enabling access to the surface of the substrate. ### Claim 11 (depends on 9) The system of claim 9, wherein each of the fluid lanes includes a valve configured to isolate a fluid path between one of the respective staging vessels and the respective pumps or the respective pumps and the respective reactors. ### Claim 12 (depends on 9) The system of claim 9, wherein an inlet to the reactor is along an axis of the reactor and the flow of the fluid proceeds radially across a surface of a substrate disposed under the reactor. ### Claim 13 (depends on 9) The system of claim 9, wherein the plurality of reactors operate in parallel to process different regions of a substrate disposed thereunder differently. ### Claim 14 A combinatorial processing system, comprising; a plurality of fluid flow mechanisms, each having an open staging vessel configured to receive fluid for wet processing operations and a pump in fluid communication with an outlet of the staging vessel through a fluid line; and reactors corresponding to respective fluid flow mechanisms, the reactors defining a reaction region on a surface of a substrate, the reactor in fluid communication with the pump, wherein the pump is configured to provide a forced flow of the fluid from the staging vessel through the reactor such that the fluid is pressurized within the reactor, the reactor including fluid separation partitions configured to contact the surface of the substrate, wherein gaps between the plurality of partitions define fluid lanes enabling access to the forced flow of the fluid to the surface of the substrate. ### Claim 15 (depends on 14) The system of claim 14, further comprising: a substrate support configured to rotate the substrate. ### Claim 16 (depends on 14) The system of claim 14, wherein the fluid lanes have windows defined therein, the windows providing the access to the forced flow of the fluid to the surface ofthe substrate. ### Claim 17 (depends on 14) The system of claim 14, wherein access to the fluid lanes is controlled by respective access doors. ### Claim 18 (depends on 17) The system of claim 17, wherein each of the respective access doors are pivotably mounted alongside an end of a corresponding fluid separation partition. ### Claim 19 (depends on 14) The system of claim 14, wherein the pump is configured to operate in a bidirectional manner. ### Claim 20 (depends on 14) The system of claim 14, further comprising; a valve configured to fill the fluid line from the staging vessel when the pump provides flow in a first direction, the valve further configured to isolate the staging vessel from the fluid line when the pump provides flow in a second direction.