Optical semiconductor device and method of fabricating the same
AssigneeSumitomo Electric Device Innovations, Inc.
InventorsTaro HASEGAWA, Toshiyuki TAGUCHI
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Abstract
An optical semiconductor device comprises: a first insulating film provided on a semiconductor layer; a heater provided on the first insulating film; a second insulating film provided on the heater; and an electrode provided on the heater. The electrode extends on the second insulating film; the electrode is in contact with the heater; the second insulating film includes a first region on which the electrode is located; and a thickness of the first region of the second insulating film is greater than that of the first insulating film.
Claims16
An optical semiconductor device comprising:
- an optical waveguide;
- a first insulating film provided on the optical waveguide;
- a heater provided on the optical waveguide, the first insulating film disposed therebetween;
- a second insulating film provided on the heater;
- a window provided at the second insulating film, the heater exposed in the window;
- and
- an electrode formed in the window and on the second insulating film of periphery of the window,
- wherein a thickness of the second insulating film covered by the electrode is greater than thickness of the first insulating film.
A method of fabricating an optical semiconductor device, comprising the steps of:
- forming a first insulating film on an optical waveguide;
- forming a heater on the first insulating film;
- forming a second insulating film on the heater, the second insulating film having a thickness greater than that of the first insulating film;
- forming a window in the second insulating film, the heater being exposed through the window;
- and
- forming an electrode on the second insulating film, the electrode being in contact with the heater through the window, and the electrode extending on the second insulating film.
A heater element comprising:
- a first insulating film provided on a semiconductor layer;
- a heater provided on the first insulating film disposed therebetween;
- a second insulating film provided on the heater;
- a window provided at the second insulating film, the heater exposed in the window;
- and
- an electrode formed in the window and on the second insulating film of periphery of the window,
- wherein a thickness of the second insulating film covered by the electrode is greater than thickness of the first insulating film.
Dependencies are inferred from the claim text.