Curvature variable mirror, curvature variable unit, and manufacturing method of curvature variable mirror
AssigneeMitsubishi Electric Corporation
InventorsAkinori Nishio, Tomohiko Ishizuka
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Abstract
A curvature variable mirror includes a mirror base material that is configured such that the curvature is variable and that reflects laser light on the mirror reflective surface side, wherein the mirror base material is formed by using spring-material copper alloy, and the spring-material copper alloy is constituted by using any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni (nickel), Sn (tin), Si (silicone), Mg (magnesium), Zn (zinc), Mn (manganese), Pb (lead), Fe (iron), and Al (aluminum) to copper.
Claims12
1-7. (canceled)
A curvature variable mirror comprising a mirror base material that is configured such that a curvature is variable and that reflects laser light on a mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper and is formed by annealing to be softened to a Rockwell hardness of HRB80 or lower, and
- the spring-material copper alloy is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Si, Mg, Zn, Mn, Pb, Fe, and Al to copper.
A curvature variable mirror comprising a mirror base material that is configured such that a curvature is variable and that reflects laser light on a mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper and is formed by annealing to be softened to a Rockwell hardness of HRB80 or lower, and
- the spring-material copper alloy is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Zn, Mn, Pb, Fe, and Al to copper.
A curvature variable unit comprising:
- a curvature variable mirror that includes a mirror base material that is configured such that a curvature is variable and that reflects laser light on a mirror reflective surface side;
- and
- a fluid spray mechanism that sprays fluid on the mirror base material from a mirror back surface side that is a surface opposite to the mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper and is formed by annealing to be softened to a Rockwell hardness of HRB80 or lower, and
- the spring-material copper alloy is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Si, Mg, Zn, Mn, Pb, Fe, and Al to copper.
A curvature variable unit comprising:
- a curvature variable mirror that includes a mirror base material that is configured such that a curvature is variable and that reflects laser light on a mirror reflective surface side;
- and
- a fluid spray mechanism that sprays fluid on the mirror base material from a mirror back surface side that is a surface opposite to the mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper and is formed by annealing to be softened to a Rockwell hardness of HRB80 or lower, and
- the spring-material copper alloy is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Zn, Mn, Pb, Fe, and Al to copper.
A curvature variable unit comprising:
- a curvature variable mirror that includes a mirror base material that is configured such that a curvature is variable and that reflects laser light on a mirror reflective surface side;
- and
- a fluid spray mechanism that sprays fluid on the mirror base material from a mirror back surface side that is a surface opposite to the mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy,
- the spring-material copper alloy is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Si, Mg, Zn, Mn, Pb, Fe, and Al to copper, and
- the fluid spray mechanism sprays the fluid on an outer peripheral portion of the mirror back surface in a direction oblique to the outer peripheral portion of the mirror back surface so that the fluid flows in a direction from an inner peripheral side toward an outer peripheral side of the mirror back surface.
A manufacturing method of a curvature variable mirror, comprising an annealing step of annealing a material of a mirror base material that is configured such that a curvature is variable, that is formed by using spring-material copper alloy that is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Si, Mg, Sn, Zn, Mn, Pb, Fe, and Al to copper, and that reflects laser light on a mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper, and
- at the annealing step, the mirror base material is annealed so as to be softened to a Rockwell hardness of HRB80 or lower.
A manufacturing method of a curvature variable mirror, comprising an annealing step of annealing a material of a mirror base material that is configured such that a curvature is variable, that is formed by using spring-material copper alloy that is any of phosphor bronze, copper-nickel-zinc alloy, chromium copper, zirconium copper, titanium copper alloy, copper-nickel alloy, and alloy obtained by adding at least one of Ni, Sn, Zn, Mn, Pb, Fe, and Al to copper, and that reflects laser light on a mirror reflective surface side, wherein
- the mirror base material is formed by using spring-material copper alloy with a higher hardness than that of oxygen-free copper, and
- at the annealing step, the mirror base material is annealed so as to be softened to a Rockwell hardness of HRB80 or lower.
Dependencies are inferred from the claim text.