Optical filter device, optical module, electronic device, and mems device
AssigneeSeiko Epson Corporation
InventorsYasushi MATSUNO, Daisuke SAITO, Hideo IMAI, Shigemitsu KOIKE
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AssigneeSeiko Epson Corporation
InventorsYasushi MATSUNO, Daisuke SAITO, Hideo IMAI, Shigemitsu KOIKE
Estimating the term…
An optical filter device includes a wavelength variable interference filter, a housing that stores the wavelength variable interference filter, and a bonding member that fixes a movable substrate to the housing. The housing includes a fixing portion that comes into contact with the bonding member, the fixing portion includes a pedestal fixing surface (first surface) facing a portion of a surface of the movable substrate, a sidewall fixing surface (second surface), continuous with a portion of a periphery of the pedestal fixing surface, which faces a lateral side of the movable substrate, and an intersection surface (third surface) continuous from a remaining portion in a periphery of the pedestal fixing surface in a direction away from the movable substrate, and the bonding member is provided between the substrate surface and the pedestal fixing surface, and between the lateral side and the sidewall fixing surface.
An optical filter device comprising:
An optical module comprising:
An electronic device comprising:
A MEMS device comprising:
Dependencies are inferred from the claim text.