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US 2015/0092273 A1Published application
Interference filter, optical filter device, optical module, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorAkira SANO
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Abstract
A variable wavelength interference filter includes a stationary reflecting film formed of a plurality of layers, an outermost layer of which is a stationary conductive layer, and a movable reflecting film, the stationary reflecting film includes a first region opposed to the movable reflecting film and a second region continuing from an outer circumferential edge of the first region to an outside of the first region, and a part of the stationary conductive layer in the second region is a terminal section to which wiring connection can be performed.
Claims19
An interference filter comprising:
- a first reflecting film formed of a plurality of layers, the plurality of layers including a first conductive outermost layer;
- and
- a second reflecting film opposed to the first reflecting film,
- wherein the first reflecting film includes a first region facing the second reflecting film and a second region extending outwardly from an outer circumferential edge of the first region, and
- the first conductive layer includes a first terminal in the second region.
2 more elements
An interference filter comprising:
- a first substrate;
- a second substrate opposed to the first substrate;
- a first reflecting film on the first substrate, the first reflecting film being formed of a plurality of layers, the plurality of layers including a first conductive outermost layer;
- a second reflecting film on the second substrate, the second reflecting film being formed of a second plurality of layers including a second conductive outermost layer;
- a first electrode provided to the first substrate;
- and
- a second electrode provided to the second substrate, the second electrode being opposed to the first electrode,
- wherein the first reflecting film includes a first region facing the second reflecting film and a second region extending outwardly from an outer circumferential edge of the first region,
- the second reflecting film includes a third region facing the first region of the first reflecting film, and a fourth region extending outwardly from an outer circumferential edge of the third region,
- the first conductive layer includes a first terminal in the second region,
- the second conductive layer includes a second terminal in the fourth region,
- the first electrode is disposed outside the first region in a plan view, and
- the second electrode is disposed on the second conductive layer.
10 more elements
Dependencies are inferred from the claim text.