Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

An exposure apparatus that exposes a substrate with an illumination light via a projection optical system, the apparatus comprising:

• a frame member supporting the projection optical system;
• a base placed under the projection optical system;
• a stage having a holder to hold the substrate and placed on the base;
• a drive system having a motor, the motor driving the stage supported in a noncontact manner on the base;
• an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head supported by the frame member, the encoder system measuring positional information of the stage by a plurality of the heads that face the grating section;
• and
• a controller coupled to the drive system, the controller controlling a driving of the stage while compensating for a measurement error of the encoder system that occurs due to the grating section based on measurement information of the encoder system, wherein
• at least in an exposure operation of the substrate, the positional information of the stage is measured by the encoder system.

A method of making an exposure apparatus that exposes a substrate with an illumination light via a projection optical system, the method comprising:

• providing a frame member supporting the projection optical system;
• providing a base placed under the projection optical system;
• providing a stage having a holder to hold the substrate and placed on the base;
• providing a drive system having a motor, the motor driving the stage supported in a noncontact manner on the base;
• providing an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head supported by the frame member, the encoder system measuring positional information of the stage by a plurality of the heads that face the grating section;
• and
• coupling a controller to the drive system, the controller controlling a driving of the stage while compensating for a measurement error of the encoder system that occurs due to the grating section based on measurement information of the encoder system, wherein
• at least in an exposure operation of the substrate, the positional information of the stage is measured by the encoder system.