Method for repairing optical elements, and optical element
OwnerOli Ehrler, Uwe Meier +2inventors
InventorsOli Ehrler, Uwe Meier, Alexander Uhl, Holger Kierey
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Abstract
A method for repairing a collector for an EUV projection exposure apparatus having a first coating and a second coating, wherein the first coating is arranged between the second coating and a surface of the collector. The method includes completely or partly removing the first coating by treatment with a first chemical solution, and applying a new first coating.
Claims21
1-11. (canceled)
A method of modifying an EUV projection exposure collector which comprises a first coating and a second coating, the first coating being between the second coating and a surface of the collector, the method comprising:
- a) using a first chemical solution to at least partially remove the first coating;
- and
- b) applying a third coating to at least partially replace the removed first coating,
- wherein:
- the first coating comprising a first material comprising at least one material selected from the group consisting of nitride SixNy, zirconium nitride ZrxNy, titanium oxide TixO, and yttrium oxide YxOy;
- the second coating comprising a second material,
- the first chemical solution has a first etching rate for the first material;
- the first chemical solution has a second etching rate for the second material;
- and
- the first etching rate is at least five times greater than the second etching rate.
A collector comprising a first coating and a second coating, wherein:
- the first coating is between the second coating and a surface of the collector;
- the first coating comprises at least one material comprising at least one material selected from the group consisting of nitride SixNy, zirconium nitride ZrxNy, titanium oxide TixO, and yttrium oxide YxOy;
- the second coating comprises:
- a) a plurality of alternately layers of molybdenum and silicon;
- or b) a layer comprising ruthenium, palladium, platinum or gold;
- and
- the collector is an EUV projection exposure collector.
Dependencies are inferred from the claim text.