Surface State Evaluation Apparatus and Surface State Evaluation Method
AssigneeKabushiki Kaisha Toshiba
InventorsShingo KANAMITSU, Hideaki SAKURAI
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Abstract
According to one embodiment, a surface state evaluation apparatus includes an imaging unit and a processing unit. The imaging unit is configured to image a first region and a second region of a surface of a sample. A plurality of liquid droplets are provided in the first region, and a plurality of liquid droplets are provided in the second region. The processing unit is configured to evaluate a state of the surface based on a result of comparing a first image of the first region imaged by the imaging unit and a second image of the second region imaged by the imaging unit.
Claims20
A surface state evaluation apparatus, comprising:
- an imaging unit configured to image a first region and a second region of a surface of a sample, a plurality of liquid droplets being provided in the first region, a plurality of liquid droplets being provided in the second region;
- and
- a processing unit configured to evaluate a state of the surface based on a result of comparing a first image of the first region imaged by the imaging unit and a second image of the second region imaged by the imaging unit.
A surface state evaluation apparatus, comprising:
- an imaging unit configured to image a sample having a plurality of liquid droplets formed on a surface of the sample;
- and
- a processing unit configured to process an image acquired by the imaging unit,
- the processing unit being configured to evaluate a state of the surface of the sample by at least one selected from comparing a density of the liquid droplets in the image to a first threshold, comparing a size of the liquid droplets in the image to a second threshold, and comparing a brightness of the image to a third threshold.
A surface state evaluation method, comprising:
- imaging a first region and a second region of a surface of a sample, a plurality of liquid droplets being provided in the first region, a plurality of liquid droplets being provided in the second region;
- and
- processing to evaluate a state of the surface based on a result of comparing a first image of the first region imaged in the imaging and a second image of the second region imaged in the imaging.
A surface state evaluation method, comprising:
- imaging a surface of a sample having a plurality of liquid droplets provided on the surface;
- and
- processing an image imaged by the imaging,
- the processing unit being configured to evaluate a state of the surface by at least one selected from comparing a density of the plurality of liquid droplets in the image to a first threshold, comparing a size of the liquid droplets in the image to a second threshold, and comparing a brightness of the image to a third threshold.
Dependencies are inferred from the claim text.