Slow wave inductive structure and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Tsung YEN, Cheng-Wei LUO
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Abstract
A slow wave inductive structure includes a first substrate, a first conductive winding over the first substrate, and a second substrate over the first substrate. The second substrate has a thickness ranging from about 50 nanometers (nm) to about 150 nm. A distance between the first conductive winding and the second substrate ranges from about 1 micron (μm) to about 2 μm. A slow wave inductor includes a first substrate and a first conductive winding over the first substrate. The slow wave inductor further includes a second substrate over the first substrate and a plurality of switches in the second conductive substrate. The first conductive winding is connected to each switch of the plurality of switches.
Claims20
A slow wave inductive structure comprising:
- a first substrate;
- a first conductive winding over the first substrate;
- and
- a second substrate over the first substrate, the second substrate having a thickness ranging from about 50 nanometers (nm) to about 150 nm, wherein a distance between the first conductive winding and the second substrate ranges from about 1 micron (μm) to about 2 μm.
A slow wave inductor comprising:
- a first substrate;
- a first conductive winding over the first substrate;
- a second substrate over the first substrate;
- and
- a plurality of switches in the second conductive substrate, wherein the first conductive winding is connected to at least one switch of the plurality of switches.
A method of making a slow wave inductive structure, the method comprises:
- forming a first conductive winding over a first substrate;
- and
- bonding a second substrate to the first substrate, wherein the second substrate has a thickness ranging from about 50 nanometers (nm) to about 150 nm, wherein a distance between the first conductive winding and the second substrate ranges from about 1 micron (μm) to about 2 μm.
Dependencies are inferred from the claim text.