Structures for registration error compensation

A filter comprising:

• a first conductive layer comprising a first resonator element, a second resonator element, and a third resonator element, wherein the first resonator element and the second resonator element each define a first end, an opposing second end, a first lateral edge, a second lateral edge, and a length extending in a longitudinal direction between the first end and the second end, wherein the first resonator element and second resonator element each comprise:
• a first extension portion proximate the second end that extends laterally from the first lateral edge, wherein the first extension portion defines a first portion and a second portion, wherein the first portion defines a top edge that extends laterally from the first lateral edge at a first longitudinal distance from the second end in the longitudinal direction, wherein the second portion defines a top edge that extends longitudinally above the top edge of the first portion a second longitudinal distance from the second end in the longitudinal direction, wherein the second longitudinal distance is greater than the first longitudinal distance;
• and
• a second extension portion proximate the second end that extends laterally from the second lateral edge, wherein the second extension portion defines a first portion and a second portion, wherein the first portion defines a top edge that extends laterally from the second lateral edge at a third longitudinal distance from the second end in the longitudinal direction, wherein the second portion defines a top edge that extends longitudinally above the top edge of the first portion a fourth longitudinal distance from the second end in the longitudinal direction, wherein the fourth longitudinal distance is greater than the third longitudinal distance;
• wherein the third longitudinal distance is greater than the first longitudinal distance such that the top edge of the first portion of the second extension portion is positioned longitudinally above the top edge of the first portion of the first extension portion;
• a second conductive layer;
• a first communication feature configured to electrically couple the first conductive layer and the second conductive layer at a first communication position on the first resonator element, wherein the first communication position is positioned on the second portion of the first extension portion of the first resonator element such that a center of the first communication position is longitudinally above the top edge of the first portion of the first extension portion of the first resonator element;
• a second communication feature configured to electrically couple the first conductive layer and the second conductive layer at a second communication position on the first resonator element, wherein the second communication position is positioned on the second portion of the second extension portion of the first resonator element such that a center of the second communication position is longitudinally above the top edge of the first portion of the second extension portion of the first resonator element, wherein the second communication position is positioned longitudinally above the first communication position in the longitudinal direction;
• a third communication feature configured to electrically couple the first conductive layer and the second conductive layer at a third communication position on the second resonator element, wherein the third communication position is positioned on the second portion of the first extension portion of the second resonator element such that a center of the third communication position is longitudinally above the top edge of the first portion of the first extension portion of the second resonator element;
• a fourth communication feature configured to electrically couple the first conductive layer and the second conductive layer at a fourth communication position on the second resonator element, wherein the fourth communication position is positioned on the second portion of the second extension portion of the second resonator element such that a center of the fourth communication position is longitudinally above the top edge of the first portion of the second extension portion of the second resonator element, wherein the fourth communication position is positioned longitudinally above the third communication position in the longitudinal direction.

A method of manufacturing a resonator, the method comprising:

• providing a first conductive layer comprising a resonator element, wherein the resonator element defines a first end, an opposing second end, a first lateral edge, a second lateral edge, and a length extending in a longitudinal direction between the first end and the second end, wherein the resonator element comprises:
• a first extension portion proximate the second end that extends laterally from the first lateral edge, wherein the first extension portion defines a first portion and a second portion, wherein the first portion defines a top edge that extends laterally from the first lateral edge at a first longitudinal distance from the second end in the longitudinal direction, wherein the second portion defines a top edge that extends longitudinally above the top edge of the first portion a second longitudinal distance from the second end in the longitudinal direction, wherein the second longitudinal distance is greater than the first longitudinal distance;
• and
• a second extension portion proximate the second end that extends laterally from the second lateral edge, wherein the second extension portion defines a first portion and a second portion, wherein the first portion defines a top edge that extends laterally from the second lateral edge at a third longitudinal distance from the second end in the longitudinal direction, wherein the second portion defines a top edge that extends longitudinally above the top edge of the first portion a fourth longitudinal distance from the second end in the longitudinal direction, wherein the fourth longitudinal distance is greater than the third longitudinal distance;
• wherein the third longitudinal distance is greater than the first longitudinal distance such that the top edge of the first portion of the second extension portion is positioned longitudinally above the top edge of the first portion of the first extension portion;
• providing a second conductive layer;
• and
• forming a first communication feature configured to electrically couple the first conductive layer and the second conductive layer at a first communication position, wherein the first communication position is positioned on the second portion of the first extension portion such that a center of the first communication position is longitudinally above the top edge of the first portion of the first extension portion;
• and
• forming a second communication feature configured to electrically couple the first conductive layer and the second conductive layer at a second communication position, wherein the second communication position is positioned on the second portion of the second extension portion such that a center of the second communication position is longitudinally above the top edge of the first portion of the second extension portion, wherein the second communication position is positioned longitudinally above the first communication position in the longitudinal direction.