Cold cathode ionization vacuum gauge
AssigneeMKS Instruments, Inc.
InventorsGerardo A. Brucker, Timothy C. Swinney, Brandon J. Kelly, Alfred A. Funari, Michael N. Schott, Kristian S. Schartau
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AssigneeMKS Instruments, Inc.
InventorsGerardo A. Brucker, Timothy C. Swinney, Brandon J. Kelly, Alfred A. Funari, Michael N. Schott, Kristian S. Schartau
Estimating the term…
A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
A cold cathode ionization vacuum gauge assembly comprising an ion gauge, the ion gauge comprising:
A cold cathode ionization vacuum gauge assembly comprising:
A cable for connecting an electronics module to a cold cathode ionization vacuum gauge, with the vacuum gauge and electronics module displaced from each other, the cable having a first end and a second end, the first end being configured to imitate physical mating surfaces of the vacuum gauge to mate to the electronics module, and the second end being configured to imitate physical mating surfaces of the electronics module to mate to the vacuum gauge.
A method of operating a cold cathode ionization vacuum gauge comprising:
A method of operating a cold cathode ionization vacuum gauge comprising:
A method of operating a cold cathode ionization vacuum gauge comprising:
Dependencies are inferred from the claim text.