Loading patent…
AssigneeMicron Technology, Inc.
InventorsNicholas Hendricks, Adam L. Olson, William R. Brown, Ho Seop Eom, Xue Chen, Kaveri Jain, Scott Schuldenfrei
Estimating the term…
A method of forming nanostructures may include forming a block copolymer composition within a trench in a material on a substrate, wherein the block copolymer composition may comprise a block copolymer material and an activatable catalyst having a higher affinity for a first block of the block copolymer material compared to a second block of the block copolymer material; self-assembling the block copolymer composition into first domains comprising the first block and the activatable catalyst, and second domains comprising the second block; generating catalyst from the activatable catalyst in at least one portion of the first domains to produce a structure comprising catalyst-containing domains and the second domains, the catalyst-containing domains comprising the first block and the catalyst; and reacting a metal oxide precursor with the catalyst in the catalyst-containing domains to produce a metal oxide-containing structure comprising the first block and metal oxide.
A method of forming nanostructures, comprising:
A method of forming nanostructures, comprising:
A semiconductor structure comprising a self-assembled nanostructure on a substrate, the self-assembled nanostructure comprising self-assembled domains in a matrix, the self-assembled domains comprising at least a first portion and a second portion, the first portion comprising a first block of a block copolymer material and a first metal oxide, the second portion comprising the first block of the block copolymer material and a second metal oxide, the matrix comprising a second block of the block copolymer material and substantially without any metal oxide.
A self-assembled nanostructure comprising first domains and second domains, the first domains comprising a first block of a block copolymer material and an activatable catalyst, the second domains comprising a second block and substantially without the activatable catalyst, the activatable catalyst capable of generating catalyst upon application of activation energy, the catalyst capable of reacting with a metal oxide precursor to provide a metal oxide.
Dependencies are inferred from the claim text.