Color filter including clear pixel and hard mask
AssigneeOmniVision Technologies, Inc.
InventorsGang Chen, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
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Abstract
Embodiments of an apparatus including a color filter arrangement formed on a substrate having a pixel array formed therein. The color filter arrangement includes a clear filter having a first clear hard mask layer and a second clear hard mask layer formed thereon, a first color filter having the first clear hard mask layer and the second hard mask layer formed thereon, a second color filter having the first clear hard mask layer formed thereon, and a third color filter having no clear hard mask layer formed thereon. Other embodiments are disclosed and claimed.
Claims20
An apparatus comprising:
- a color filter arrangement formed on a substrate having a pixel array formed therein, the color filter arrangement including:
- a clear filter having a first clear hard mask layer and a second clear hard mask layer formed thereon;
- a first color filter having the first clear hard mask layer and the second hard mask layer formed thereon;
- a second color filter having the first clear hard mask layer formed thereon, and
- a third color filter having no clear hard mask layer formed thereon.
An apparatus comprising:
- a substrate having a front side and a back side;
- an image sensor including a pixel array formed in or on the front side of the substrate;
- a color filter arrangement formed over a corresponding number of pixels of the pixel array, the color filter arrangement including a set of filters comprising:
- a clear filter having a first clear hard mask layer and a second clear hard mask layer formed thereon;
- a first color filter having the first clear hard mask layer and the second hard mask layer formed thereon;
- a second color filter having the first clear hard mask layer formed thereon, and
- a third color filter having no clear hard mask layer formed thereon.
Dependencies are inferred from the claim text.