X-ray sensor and method of manufacturing the same
AssigneesRayence Co., Ltd., VatechEwoo Holdings Co., Ltd.
InventorsSung Kyn HEO, Ho Seok LEE
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Abstract
This invention relates to a direct conversion X-ray sensor and to a method of manufacturing the same. This X-ray sensor includes an array substrate including a pixel electrode formed so as to protrude from a surface thereof at a pixel region; a photoconductive substrate including an upper electrode, and a photoconductive layer formed on a surface of the upper electrode so as to be in contact with the pixel electrode and having a PIN diode structure; and a bonding material filling a space around a contact region of the pixel electrode and the photoconductive layer so as to bond the array substrate and the photoconductive substrate.
Claims9
An X-ray sensor, comprising:
- an array substrate including a pixel electrode formed so as to protrude from a surface thereof at a pixel region;
- a photoconductive substrate including an upper electrode, and a photoconductive layer formed on a surface of the upper electrode so as to be in contact with the pixel electrode and having a PIN diode structure;
- and
- a bonding material filling a space around a contact region of the pixel electrode and the photoconductive layer so as to bond the array substrate and the photoconductive substrate.
A method of manufacturing an X-ray sensor, comprising:
- (a) manufacturing an array substrate including a pixel electrode formed so as to protrude from a surface thereof at a pixel region;
- (b) manufacturing a photoconductive substrate including an upper electrode and a photoconductive layer formed on a surface of the upper electrode;
- and
- (c) applying a bonding material on the array substrate or the photoconductive substrate, attaching the array substrate and the photoconductive substrate so that the pixel electrode and the photoconductive layer are in contact, and performing heating and cooling process to bond the array substrate and the photoconductive substrate.
Dependencies are inferred from the claim text.