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US 2015/0091107 A1Published application
Die bond design for medium pressure sensor
AssigneeContinental Automotive Systems, Inc.
InventorJoe Pin Wang
Life of this patent
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Abstract
A micro-electromechanical pressure transducer formed from a silicon die centers itself on a pedestal, formed from either a metal or a dielectric, by applying a predetermined amount of liquid epoxy adhesive to the square, top surface of the pedestal and allowing the liquid adhesive to distribute itself over the top surface. A MEMS die placed atop the liquid adhesive is centered on the top surface by surface tension between sides of the die and the top surface.
Claims18
A pressure sensor comprising:
- a micro-electromechanical pressure transducer (MEMS sensor) comprising:
- a first, substantially right-rectangular prism made of silicon having four, substantially vertical and substantially rectangular sides and substantially square and opposing top and bottom surfaces, the top and bottom surfaces of the first prism having four substantially equal-length sides with a first length dimension, the top and bottom surfaces having a corresponding first area, the top surface also defining a diaphragm, which deflects responsive to a pressure applied to the diaphragm, the first prism also having a first hole through the bottom surface and which extends through the first prism to an open space below the diaphragm;
- a pedestal formed from a second, substantially right-rectangular prism having four, substantially vertical and substantially rectangular sides and substantially square and opposing top and bottom opposing surfaces, the top and bottom surfaces of the second prism having four, substantially equal length sides with a second length dimension and a corresponding second area, the second length dimension being greater than the first length dimension, the second area also being greater than the first area, the second prism also having a second hole, which extends through the second prism and its top and bottom surfaces, the second hole being aligned with the first hole;
- and
- a die bond layer located between said top side of the second prism and the bottom surface of the first prism, the die bond layer being formed from a predetermined volume of a liquid adhesive, which hardens by curing, the liquid adhesive having a predetermined viscosity prior to curing, the adhesive also having a surface tension, the liquid adhesive being selected such that surface tension of the liquid adhesive causes the predetermined volume of liquid to distribute itself evenly around the second hole.
2 more elements
A method of forming a pressure sensor comprising a comprising the steps of:
- applying a predetermined amount of a predetermined liquid adhesive to a top surface of a pedestal formed from a first substantially right-rectangular prism, having four, substantially vertical and substantially rectangular sides, a substantially square top surface having a center and an opposing substantially square bottom surface having a center, the top surface having four substantially equal-length sides and a first surface area, the first prism having a first through hole, which extends through the top and bottom surfaces, the liquid adhesive distributing itself on the top surface and around the hole prior to its curing;
- and
- applying a micro-electromechanical pressure transducer die (MEMS sensor) to the liquid adhesive on the top surface of the pedestal, the MEMS sensor die being formed from a second, substantially right-rectangular prism made of silicon, the second prism having substantially planar top and bottom opposing surfaces having four substantially equal-length sides, the top and bottom surfaces having a center and a second surface area, which is less than the first surface area, the second prism further comprising a through hole, which extends through the top and bottom surfaces;
- whereby the liquid adhesive forms a filet around exterior side surfaces of the MEMS sensor after the MEMS sensor is applied to the liquid adhesive, whereby surface tension of the liquid adhesive around the MEMS sensor causes the MEMS sensor to be aligned to the center of the top surface of the pedestal.
1 more element
Dependencies are inferred from the claim text.