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AssigneeGlobalfoundries Inc.
InventorsXusheng Wu, Bingwu Liu, Randy Mann
Estimating the term…
Approaches for providing a hardmask used during a halo/extension implant of a static random access memory (SRAM) layout for a semiconductor device are disclosed. Specifically, approaches are provided for forming a pull-down (PD) transistor over a substrate; forming a pass-gate (PG) transistor over the substrate; and patterning a hardmask over the device, the hardmask including a first section adjacent the PD transistor and a second section adjacent the PG transistor, wherein a distance between the first section and the PD transistor is shorter than a distance between the second section and the PG transistor. The respective distances between the first section and the PD transistor, and the second section and the PG transistor, are selected to prevent a halo/extension implant from impacting one side of the PD transistor, while allowing the halo/extension implant to impact both sides of the PG transistor.
A device, comprising:
A fin field effect transistor (FinFET) device, comprising:
A method for forming a hardmask for a halo/extension implant of a static random access memory (SRAM) layout for a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.