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US 2015/0091007 A1Published application
Method for producing a microsystem having a thin film made of lead zirconate titanate
AssigneePyreos Ltd.
InventorsCarsten Giebeler, Matthias Schreiter, Thorsten Steinkopff, Wolfram Wersing
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Abstract
A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).
Claims15
A method for producing a micro system, comprising:
- providing a substrate made of aluminum oxide;
- producing a thin film on the substrate by depositing lead zirconate titanate onto the substrate with a thermal deposition method such that the lead zirconate titanate in the thin film is self-polarized and is present predominantly in a rhombohedral phase;
- and
- cooling down the substrate together with the thin film.
1 more element
An infrared light sensor chip with a micro system, comprising:
- an aluminum oxide substrate, and
- a lead zirconate titanate thin firm deposited on the substrate, wherein the lead zirconate titanate is self-polarized and predominantly in a rhombohedral phase.
Dependencies are inferred from the claim text.