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US 2015/0091006 A1Published application
Thin Film Transistor Substrate Having Metal Oxide Semiconductor and Method for Manufacturing the Same
AssigneeLG Display Co., Ltd.
InventorsKisul Cho, Seongmoh Seo
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Abstract
The present disclosure relates to a thin film transistor substrate with a metal oxide semiconductor layer that has enhanced characteristics and stability. The present disclosure also relates to a method for manufacturing a thin film transistor substrate in which a thermal treatment is conducted for the metal oxide semiconductor layer and the damages to the substrate by the thermal treatment are minimized
Claims6
A thin film transistor substrate, comprising:
- a gate electrode formed on a substrate;
- a gate insulating layer covering first portions of the gate electrode and exposing second portions of the gate electrode;
- a semiconductor active layer overlapping with the first portions of the gate electrode on the gate insulating layer;
- a gate line contacting the second portions of the gate electrode and running in a horizontal direction on the substrate;
- an intermediate insulating layer exposing middle portions of the semiconductor active layer and covering the gate line and the gate electrode;
- a data line running in a vertical direction on the substrate on the intermediate insulating layer;
- a source electrode branching from the data line and contacting a side of the semiconductor active layer;
- and
- a drain electrode facing the source electrode, separated by a predetermined distance from the source electrode, and contacting another side of the semiconductor active layer.
6 more elements
Dependencies are inferred from the claim text.