Target processing unit

Target processing unit, comprising:

• a projection column for generating, shaping, and directing a beam toward a target, wherein the projection column comprises a projection lens assembly for directing the beam toward the target;
• a carrier frame for accommodating the projection lens assembly,
• wherein the projection lens assembly comprises:
• a flat lens support body for accommodating a lens element, wherein the lens support body spans a plane and comprises a connection region and a lateral edge, and wherein the lens support body is arranged for insertion along an insertion direction parallel with the plane into the carrier frame;
• a plurality of conduits emanating from the connection region and directed parallel with the plane;
• and
• a conduit guiding body arranged for accommodating the conduits,
• wherein the conduit guiding body comprises:
• a first guiding portion that is arranged for guiding the conduits from the connection region, parallel with the plane, and with a non-zero direction component perpendicular to the insertion direction, to a lateral region beyond the lateral edge;
• and
• a second guiding portion for guiding the conduits from the lateral region with a non-zero direction component perpendicular to the plane toward a tilted edge of the conduit guiding body.