Microwave heating apparatus and processing method

A processing method for heating a target object to be processed by using a microwave heating apparatus which includes a processing chamber configured to accommodate the target object, the processing chamber having a microwave irradiation space, a support device configured to support the target object in the processing chamber, and a microwave introducing device configured to generate microwaves for heating the target object and introduce the microwaves into the processing chamber,

• wherein the processing chamber further has a top wall, a bottom wall, and four sidewalls connected to each other,
• wherein the top wall has a plurality of microwave introduction ports through which the microwaves generated in the microwave introducing device are introduced into the processing chamber,
• wherein each of the microwave introduction ports is formed in a rectangular shape having long sides and short sides in a plan view, the long sides and the short sides being parallel to inner wall surfaces of the four sidewalls,
• wherein the support device has a support member in contact with the target object to support the target object, and a rotating mechanism for rotating the target object supported by the support member,
• wherein the microwave introduction ports are divided into microwave introduction ports corresponding to an inner microwave radiation zone and microwave introduction ports corresponding to an outer microwave radiation zone in a direction outward from a center of the top wall, and
• wherein the target object is processed by introducing microwaves from each of the microwave introduction ports while rotating the target object supported by the support member by the rotating mechanism.