Lifting device and automatic handling system thereof

An automatic handling system comprising:

• a suspension rail and at least one automatic guiding vehicle configured to move along the suspension rail for transporting a wafer carrier between different processing tools;
• and
• at least one lifting device configured to connect the automatic guiding vehicle, comprising:
• an elevating holder arranged below the automatic guiding vehicle, having a motion sensor configured to detect whether the elevating holder is in a horizontal state or a non-horizontal state;
• a plurality of suspension modules arranged on the automatic guiding vehicle for suspensively supporting the elevating holder;
• and
• a plurality of first drive modules configured to connect the suspension modules respectively;
• wherein the first drive modules being used to synchronously drive the suspension modules according the horizontal state detected by the motion sensor, and wherein the first drive modules being used to individually drive each of the suspension modules according the non-horizontal state detected by the motion sensor to recover the elevating holder from the non-horizontal state as the horizontal state.